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Bis(trimethylsilyl)amine (also known as hexamethyldisilazane, or HMDS) is an organosilicon compound with the molecular formula [(CH3)3Si]2NH. The molecule is a derivative of ammonia with trimethylsilyl groups in place of two hydrogen atoms. This colorless liquid is a reagent and a precursor to bases that are popular in organic synthesis and organometallic chemistry. In photolithography, HMDS is often used as an adhesion promoter for photoresist. Best results are obtained by applying HMDS from the gas phase on heated substrates. In electron microscopy, HMDS can be used as an alternative to critical point drying during sample preparation. In pyrolysis-gas chromatography-mass spectrometry, HMDS is added to the analyte to create sylilated diagnostic products during pyrolysis, in order to enhance detectability of compounds with polar functional groups. Formula C6H19NSi2 Molar mass 161.395 g/mol CAS Number 999-97-3 Density 0.7741 g/cm3 at 25 deg C Purity/Grade >99% (Reagent Plus) Apearance Liquid Melting point -78 °C Boiling point 125 °C Solubility in water 392 mg/l at 25 °C/Estimated/ Solubility in ethanol Soluble Refractive index (nD) 1.4090 at 20 °C. Note: The chemical specifications for some items on this product page may differ from the specifications listed above. For more information


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